Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Development of Low Energy Focused Ion Beam System for Direct Deposition
Shinji NAGAMACHI, Yasuhiro YAMAKAGE, Hiromasa MARUNO, Masahiro UEDA, Seiji SUGIMOTO, Masatoshi ASARI, Junzo ISHIKAWA
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1993 Volume 36 Issue 11 Pages 885-888

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