Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Surface Modification of Various Carbons by SF6 Plasma
Masaaki KATOH, Takeo OHTE, Sugio OHTANI, Akira KOJIMA, Atsushi NISHIWAKI, Junichi MISHIMA
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1994 Volume 37 Issue 3 Pages 187-190

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[in Japanese]
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© The Vacuum Society of Japan
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