Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Large-Area Electron Cyclotron Resonance Plasma Source with Permanent Magnets (2)
Etching Characteristics
Takashi INOUE, Tadayoshi OGAWA, Wataru MIYAZAWA, Yukio OKAMOTO, Shoji DEN, Yuzo HAYASHI, Yuichi SAKAMOTO
Author information
JOURNAL FREE ACCESS

1994 Volume 37 Issue 3 Pages 316-318

Details
Download PDF (333K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© The Vacuum Society of Japan
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top