Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Compact High Density Radical Source
Hideaki SATOWataru MIYAZAWATakashi INOUEShoji DENYuzo HAYASHIYukio OKAMOTOYuichi SAKAMOTO
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JOURNAL FREE ACCESS

1994 Volume 37 Issue 3 Pages 319-321

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© The Vacuum Society of Japan
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