Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Properties of Au-CH Thin Films prepared by Low Energy Plasma Sputtering in Ar and CH4 mixture gas
Akio OKAMOTOToshikazu NOSAKAMasaaki YOSHITAKEYoshihiko SUZUKISouichi OGAWA
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1994 Volume 37 Issue 3 Pages 326-328

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© The Vacuum Society of Japan
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