Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
The Effects of Substrate Temperature on the Properties of ZnO : Al Thin Films Prepared by RF Magnetron Sputtering
Yasuhiro IGASAKI
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1994 Volume 37 Issue 3 Pages 329-332

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© The Vacuum Society of Japan
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