Analysis of TMP's Ultimate Pressure and Development of XHV-TMP and XHV-CMP
1994 年 37 巻 9 号 p. 742-750
詳細
1994 年 37 巻 9 号 p. 742-750
The ultimate pressure of a turbomolecular pump (TMP) depends on its backing pressure and compression ratio. Performance of TMP was analyzed, taking the out-gassing from TMP blades into consideration. A 250 L/s TMP and a 1100 L/s compound molecular pump (CMP) were designed based upon this theory and their performance was measured. The ultimate pressure was 5E-10 Pa, which is in the XHV region.
