抄録
In order to understand the discharge mechanism of crossed electrical and magnetic field discharge, a fine probe is inserted into the planar magnetron discharge, and the potential distribution and its characteristics are measured. In the positive space charge region (PSC), a sharp cathode fall is observed. On the other hand, it is found in the negative space charge region (NSC) that the space potential Ps is given by Ps= Vd (x/Dst )n, where Vd, x, Dst and n are the discharge voltage, the distance from the cathode surface, the distance between the anode and the cathode, and the slope, respectively. The slope n is about 1.7 in the pressure range of 10-310-2 Pa. In addition, the slope n is little affected by the pressure P, Vd and Dst, and is kept in the range of 1.61.8.
