Abstract
Usint experimental profiles for the radial beam-plasma parameters and electron impact ionization cross-section data, the neutral-to-ion conversion factors (NICF), α0M are determined for a selection of elements M in a new type of secondary-neutralmass-spectrometer called SNART (Sputtered Neutral Analysis Riken Type). Signal loss due to the curvature of the ion trajectories across the source magnetic field is taken into account. A comparison between the relative NICF's, α0M/α0Fe, and machine measured relative sensitivity factors D0M/ D0Fe is made. Results show the potential for quantitative analysis of insulating materials in SNART.
