Elemental Relative Sensitivities in Sputtered Neutral Mass Spectrometry Using Electron-beam-excited Plasma

抄録

Usint experimental profiles for the radial beam-plasma parameters and electron impact ionization cross-section data, the neutral-to-ion conversion factors (NICF), α⁰_M are determined for a selection of elements M in a new type of secondary-neutralmass-spectrometer called SNART (Sputtered Neutral Analysis Riken Type). Signal loss due to the curvature of the ion trajectories across the source magnetic field is taken into account. A comparison between the relative NICF's, α⁰_M/α⁰_Fe, and machine measured relative sensitivity factors D⁰_M/ D⁰_Fe is made. Results show the potential for quantitative analysis of insulating materials in SNART.