Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
The Erosion Test of Chromium Oxide Thin Films against Halogen Plasma
Kazunori KUROSAWAWataru MIYAZAWASigekazu TADAYuichi SAKAMOTOYuzou HAYASHIShoji DENHiromasa OHKAWARAHironori SAITOYukio OKAMOTO
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1995 Volume 38 Issue 3 Pages 146-149

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© The Vacuum Society of Japan
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