Shinku

Volume 38, Issue 3

Displaying 1-50 of 87 articles from this issue

Download citation

Show all abstracts

Development of Bakeable-type Cryopump with Regenerator-separated GM Cooling System

Hiroki OHZORA, Yutaka MATSUI, Shinji FURUYA, Kenji ARASAWA

1995 Volume 38 Issue 3 Pages 117-120
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.117

JOURNAL FREE ACCESS

Download PDF (446K)
Development of High Pumping Speed (300m³/s) Cryosorption Pump for Neutral Beam Injection System in JIPP T-IIU Tokamak

Yoshihide OKA, Kazuo TOI, Tsutomu KURODA, Toshihiko TAKANASHI, Ryuuich ...

1995 Volume 38 Issue 3 Pages 121-124
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.121

JOURNAL FREE ACCESS

Download PDF (455K)
A Sputter Ion Pump to Maintain Fresh and Active Cathode Surface

Souji KOMIYA, Naoki TAKAHASHI, Min-Sheng XU

1995 Volume 38 Issue 3 Pages 125-127
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.125

JOURNAL FREE ACCESS

Download PDF (483K)
Outgassing Property of Solid-lubricated Bearings for Vacuum in Motion

Tadayoshi ITABE, Syuji YAMAZUMI

1995 Volume 38 Issue 3 Pages 128-131
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.128

JOURNAL FREE ACCESS

Download PDF (501K)
Gas Desorption Behavior of Carbon Fiber Composite/Copper Brazed Componets as a Nuclear Fusion Reactor

Yuko HIROHATA, Masao OKITA, Tomoaki HINO, Toshiro YAMASHINA, Kazuyuki ...

1995 Volume 38 Issue 3 Pages 132-135
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.132

JOURNAL FREE ACCESS

Download PDF (488K)
Creation of an Induction Plasma with Higly Uniform Radial Distribution and the Application

Yuichi SAKAMOTO, Shigekazu TADA, Wataru MIYAZAWA, C. O'MORAIN, P. O'KE ...

1995 Volume 38 Issue 3 Pages 136-138
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.136

JOURNAL FREE ACCESS

Download PDF (276K)
Diagnostics of SF₆ 13.56 MHz Discharge Using the Electrode System with Silicon Wafer

Kazuya NAGASEKI, Hideki KUSUNOKI, Hidehiko KOBAYASHI, Itsuo ISHIKAWA, ...

1995 Volume 38 Issue 3 Pages 139-142
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.139

JOURNAL FREE ACCESS

Download PDF (440K)
Spatiotemporal Optical Emission Profile in 1 MHz Discharge in CF₄/Ar Mixture

Hideki KUSUNOKI, Itsuo ISHIKAWA, Yukinori SAITO, Shinji SUGANOMATA

1995 Volume 38 Issue 3 Pages 143-145
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.143

JOURNAL FREE ACCESS

Download PDF (374K)
The Erosion Test of Chromium Oxide Thin Films against Halogen Plasma

Kazunori KUROSAWA, Wataru MIYAZAWA, Sigekazu TADA, Yuichi SAKAMOTO, Yu ...

1995 Volume 38 Issue 3 Pages 146-149
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.146

JOURNAL FREE ACCESS

Download PDF (878K)
Production of Low Pressure and High Density Plasma Using a Single Loop Ribbon Antenna

Ken'ichi TAKAGI, Yukito NAKAGAWA, Tsutomu TSUKADA

1995 Volume 38 Issue 3 Pages 150-152
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.150

JOURNAL FREE ACCESS

Download PDF (366K)
Development of Light Source Excited by Microwave

Hiroyuki YOSHIKI, Satoru SAWAMURA, Takahiro AOYAMA, Masahiro GESHIRO, ...

1995 Volume 38 Issue 3 Pages 153-155
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.153

JOURNAL FREE ACCESS

Download PDF (351K)
Development of Compact Microwave Ion Source for the Purpose of Direct Extraction of Low Energy Ion Beams

Yoshikazu FUJIMORI, Yasuhito GOTOH, Hiroshi TSUJI, Junzo ISHIKAWA

1995 Volume 38 Issue 3 Pages 156-159
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.156

JOURNAL FREE ACCESS

Download PDF (456K)
Behaviors of Plasma Impedance in ECR Plasma

Kazuki KONDO

1995 Volume 38 Issue 3 Pages 160-162
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.160

JOURNAL FREE ACCESS

Download PDF (270K)
Large-Area ECR Plasma Source Using Planar Ring-Cusp Magnetic Field

Toshiaki YASUI, Kiyotaka NAKASE, Hirokazu TAHARA, Takao YOSHIKAWA

1995 Volume 38 Issue 3 Pages 163-165
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.163

JOURNAL FREE ACCESS

Download PDF (360K)
Development of a New Ionization Gauge with Small Size Energy Filter

Hitoshi AKIMICHI, Tomonari TANAKA, Kyoko TAKEUCHI, Yutaka TUZI, Ichiro ...

1995 Volume 38 Issue 3 Pages 166-169
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.166

JOURNAL FREE ACCESS

Download PDF (434K)
On a Behavior of Electrons in a Hot Cathode Ionization Gauge

Makoto TANEBE, Hiroshi MIMA

1995 Volume 38 Issue 3 Pages 170-172
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.170

JOURNAL FREE ACCESS

Download PDF (334K)
Design and Preliminary Experiment of a New CSL Gauge

Toru KANAJI, Kiyoyuki MAN'EI, Hisao KUMAI, Yasuhiro FUJIWARA, Toshio U ...

1995 Volume 38 Issue 3 Pages 173-175
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.173

JOURNAL FREE ACCESS

Download PDF (373K)
Pressure Sensor Using Photothermal Vibration of Optical Fiber Core

Hironori KUMAZAKI, Seiki INABA, Kazuhiro HANE

1995 Volume 38 Issue 3 Pages 176-178
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.176

JOURNAL FREE ACCESS

Download PDF (417K)
Instrument for Creating Surface Layer Structure and for in-situ Layer Observation with Surface Electron Spectroscopic Tomography

Akira KUROKAWA, Shingo ICHIMURA, Jae In JEONG, Joseph TOTH, Kazuhiro Y ...

1995 Volume 38 Issue 3 Pages 179-182
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.179

JOURNAL FREE ACCESS

Download PDF (420K)
Development of Bending Magnet Section Chambers for the SPring-8 Storage Ring

Yoshihiko YANAGI, Kouji TSUMAKI, Kazuyuki SUZUKI, Megumi SUNOU, Hirosh ...

1995 Volume 38 Issue 3 Pages 183-186
Published: March 20, 1995
Released on J-STAGE: January 26, 2010

DOIhttps://doi.org/10.3131/jvsj.38.183

JOURNAL FREE ACCESS

Download PDF (500K)
Senario of Loss of Coolant Accident in a Fusion Reactor

Tomoaki HINO, Yuko HIROHATA, Toshiro YAMASHINA, Kintaro MORI

1995 Volume 38 Issue 3 Pages 187-190
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.187

JOURNAL FREE ACCESS

Download PDF (522K)
Present Status of the Ring Cyclotron Vacuum System

Akira SHIMIZU, Shinji ANO

1995 Volume 38 Issue 3 Pages 191-194
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.191

JOURNAL FREE ACCESS

Download PDF (691K)
Leak-detection Limit by Counter Flow Type Leak Detector

A Proposal How to lmprove Detection Limit

Gen'ichi HORIKOSHI, Kazuhisa KAKIHARA

1995 Volume 38 Issue 3 Pages 195-198
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.195

JOURNAL FREE ACCESS

Download PDF (502K)
Surface Treatment for Aluminum Alloys with Low Outgassing Rate

Sakae INAYOSHI, Kazuya SAITO, Sonoko TSUKAHARA, Katsunobu ISHIZAWA, Ta ...

1995 Volume 38 Issue 3 Pages 199-202
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.199

JOURNAL FREE ACCESS

Download PDF (719K)
Numerical Analysis of Unsteady Evaporating Flows from a Plane Condensed Phase into a Noncondensable Gas on the Basis of Kinetic Theory II

Toshiyuki DOI

1995 Volume 38 Issue 3 Pages 203-206
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.203

JOURNAL FREE ACCESS

Download PDF (560K)
Velocity of Copper Ions Generated from an Impulse Vacuum Arc

Koichi TSURUTA, Osamu Tan, Gin-ichi WATANABE

1995 Volume 38 Issue 3 Pages 207-210
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.207

JOURNAL FREE ACCESS

Download PDF (447K)
Evaluation for Focused Fast Atom Beam (F-FFAB) Density

Masahiro HATAKEYAMA, Ichirota NAGAHAMA, Masayuki NAKAO, Yotaro HATAMUR ...

1995 Volume 38 Issue 3 Pages 211-213
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.211

JOURNAL FREE ACCESS

Download PDF (368K)
New Plasma Enhanced Chemical Vapor Deposision Process Combined with High Energy Ion Beam

Hiroshi NAKAI, Hajime KUWAHARA, Joji SHINOHARA, Tatsumi KAWARATANI, Ma ...

1995 Volume 38 Issue 3 Pages 214-217
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.214

JOURNAL FREE ACCESS

Download PDF (670K)
Negative-Ion Production of Gas Material in RF-Plasma Sputter-Type Heavy Negative-Ion Source

Hiroshi TSUJI, Yoshio OKAYAMA, Yoshitaka TOYOTA, Yasuhito GOTOH, Junzo ...

1995 Volume 38 Issue 3 Pages 218-220
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.218

JOURNAL FREE ACCESS

Download PDF (379K)
Charging Potential Measurement of Photoresist-Layer Surface during Negative-Ion Implantation from Ion-Induced Secondary Electron Energy Analysis

Hiroshi TSUJI, Shoji NAGUMO, Yoshitaka TOYOTA, Shigeki SAKAI, Yasuhito ...

1995 Volume 38 Issue 3 Pages 221-223
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.221

JOURNAL FREE ACCESS

Download PDF (393K)
Evaluation of Charging Model in Negative-Ion Implantation

Yoshitaka TOYOTA, Hiroshi TSUJI, Shoji NAGUMO, Shigeki SAKAI, Yasuhito ...

1995 Volume 38 Issue 3 Pages 224-227
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.224

JOURNAL FREE ACCESS

Download PDF (394K)
Charging Simulation of Micro-structured Pattern in Ion Implantation

Shigeki SAKAI, Hiroshi TSUJI, Yasuhito GOTOH, Yoshitaka TOYOTA, Junzo ...

1995 Volume 38 Issue 3 Pages 228-230
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.228

JOURNAL FREE ACCESS

Download PDF (388K)
Fabrication of Ag/C Multilayer Zone Plates for X-ray

Shigeharu TAMURA, Kazuo OHTANI, Nagao KAMIJO, Yoshio SUZUKI, Hiroshi K ...

1995 Volume 38 Issue 3 Pages 231-234
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.231

JOURNAL FREE ACCESS

Download PDF (662K)
Preparation of Superconducting YBa₂Cu₃O_7-x Thin Films by Thermal Decomposition of Pulse-Sprayed Nitrate Solution

Haruyuki SORADA, Toshihiro TSUBOUCHI, Akimitsu HATTA, Toshimichi ITO, ...

1995 Volume 38 Issue 3 Pages 235-238
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.235

JOURNAL FREE ACCESS

Download PDF (629K)
RBS and SIMS Analyses of BiPbSrCaCuO Superconducting Thin Films Grown by Halide-CVD

Toshihiko MAEMOTO, Takahiro YAMASHITA, Mitsuaki YANO, Masataka INOUE, ...

1995 Volume 38 Issue 3 Pages 239-243
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.239

JOURNAL FREE ACCESS

Download PDF (738K)
Orientation of PbTiO₃ Thin Films Prerared by Sputter-Assisted Plasma CVD (II)

Toshiyuki MIHARA, Shoichi MOCHIZUKI, Ryoji MAKABE

1995 Volume 38 Issue 3 Pages 244-247
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.244

JOURNAL FREE ACCESS

Download PDF (342K)
Preparation of SrTiO₃ Films by Sputtering Using He Gas

Tetsuya KASHIMA, Akinori KINUGASA, Tomoyuki YOSHIMURA, Tsuyoshi KOYANA ...

1995 Volume 38 Issue 3 Pages 248-250
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.248

JOURNAL FREE ACCESS

Download PDF (427K)
The Study of Gas Sensing Mechanism for SnO₂ Thin-Film

Satoru ABE, Hiroaki TANIOKA, Byeongdeok YEA, Tomoyuki OSAKI, Kazunori ...

1995 Volume 38 Issue 3 Pages 251-254
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.251

JOURNAL FREE ACCESS

Download PDF (434K)
Preparation of SiO₂/TiO₂ Multilayer by Planner Magnetron Sputtering with an Inductively Coupled rf Plasma

Tadashi MORITA, Tadashi YAMAMOTO, Muneto HAKOMORI, Tohiharu KURAUCHI, ...

1995 Volume 38 Issue 3 Pages 255-258
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.255

JOURNAL FREE ACCESS

Download PDF (749K)
Pumping Speed of Cylindrical Magnetron Sputter Ion Pump for Ar, CH₄, He, H₂

Naoki TAKAHASHI, Minsheng Xu, Souji KOMIYA

1995 Volume 38 Issue 3 Pages 259-261
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.259

JOURNAL FREE ACCESS

Download PDF (376K)
Temperature Dependence of the Pumping Characteristics of Titanium Getter Pump in Ultrahigh Vacuum

Takao ARAI, Kyoko TAKEUCHI, Yutaka TUZI

1995 Volume 38 Issue 3 Pages 262-265
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.262

JOURNAL FREE ACCESS

Download PDF (464K)
Experiment on Pumping Speed Dependence of Outgassing Rate in Unbaked Vacuum System

Kenya AKAISHI, Kazuhiro EZAKI, Yusuke KUBOTA, Osamu MOTOJIMA, Motoi MU ...

1995 Volume 38 Issue 3 Pages 266-270
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.266

JOURNAL FREE ACCESS

Download PDF (687K)
Production of Extreme High Vaccum by Using a Cylindrical Magnetron Sputter Ion Pump

Minsheng XU, Naoki TAKAHASHI, Souji KOMIYA

1995 Volume 38 Issue 3 Pages 271-273
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.271

JOURNAL FREE ACCESS

Download PDF (301K)
Suppression of Outgassing from Spindt-type Cold-Cathode by Heat Treatment

Yasuhiko MIYO, Norio OGIWARA, Masahiro SAIDOH, Naoki HAYASHI, Kouichi ...

1995 Volume 38 Issue 3 Pages 274-277
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.274

JOURNAL FREE ACCESS

Download PDF (932K)
Computer Control of an Expansion Apparatus for Gauge Calibration

Masahiro HIRATA

1995 Volume 38 Issue 3 Pages 278-280
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.278

JOURNAL FREE ACCESS

Download PDF (357K)
Product of Active Oxygen by Plasma Source

Hiroshi MURAKAMI, Kazumi WATAHIKI, Akira IWASAKI, Isao KUDO

1995 Volume 38 Issue 3 Pages 281-283
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.281

JOURNAL FREE ACCESS

Download PDF (396K)
Beryllium Window Flange for Synchrotron Radiation X-ray Beamline Fabricated by Hot Isostatic Press Method

Seiji ASAOKA, Hideki MAEZAWA, Kiyotoshi NISHIDA, Naoki SAKAMOTO

1995 Volume 38 Issue 3 Pages 284-287
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.284

JOURNAL FREE ACCESS

Download PDF (836K)
Performance of Alumina RF Windows with Improved Electric Structure

Shinichiro MICHIZONO, Yoshio SAITO, Hazime MIZUNO, S. Yu. KAZAKOV

1995 Volume 38 Issue 3 Pages 288-290
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.288

JOURNAL FREE ACCESS

Download PDF (380K)
Fabrication and Test of an Induction Motor for the Turbomolecular Pump Using a Ceramic-Insulated Wire

Seiji HIROKI, Tetsuya ABE, Masashi IGUCHI, Kouichi YAMADA, Masaru TAKA ...

1995 Volume 38 Issue 3 Pages 291-294
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.291

JOURNAL FREE ACCESS

Download PDF (638K)
Phosphorus Behavior in Heavily Phosphorus-Doped Silicon Surfaces due to Annealing

X-Ray Photoelectron Spectroscopy and Secondary Ion Mass Spectroscopy

Wen Biao YING, Yusuke MIZOKAWA, Yoshitomo KAMIURA, Yong Bing YU, Masaf ...

1995 Volume 38 Issue 3 Pages 295-298
Published: March 20, 1995
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.38.295

JOURNAL FREE ACCESS

Download PDF (509K)

Register with J-STAGE for free!