Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Preparation of SrTiO3 Films by Sputtering Using He Gas
Tetsuya KASHIMA, Akinori KINUGASA, Tomoyuki YOSHIMURA, Tsuyoshi KOYANAGI, Kakuei MATSUBARA, Naoto MATSUO
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1995 Volume 38 Issue 3 Pages 248-250

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