真空
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
ガスケット変形挙動観察に基づくコンフラットシール機構の考察
黒河内 智岡部 政之斎藤 三良篠田 颯男森田 晋作
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1999 年 42 巻 10 号 p. 910-917

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A ConFlat seal mechanism is most widely used in small and/or middle-sized ultrahigh vacuum system. The existing model on its seal mechanics, however, is somewhat curious and is undoubtedly to be reconsidered.
Our experiments indicated that capturing with the contact of a disk gasket and a retaining counter is not a key factor for the sealing. We tested a taper-seal mechanism, which was newly designed to improve the inefficiency of the ConFlat mechanism. It was remarked under the tightening torque of 50 kgf cm that the seal area on a taper-seal type gasket was 3 times larger than that of a conventional disk gasket. High sealing reliability was thus achieved as expected which is mainly due to its wide seal contact area realized even for rather a hard gasket material.

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