MgO film is used in ac-PDPs (Plasma Display Panels), since it is stable and protective to a plasma and also has a high secondary electron emission. This study focused on oxygen partial pressure that is one of the parameters in electron beam evaporation. The results showed that higher oxygen partial pressure produces better crystallization. When the oxygen partial pressure is high, (111) orientation grows and the grain diameter increases. However, it was found that the density and the refractive index decreased and the gas adsorption amount increased. The increase may be due to the microstructure of MgO film, where adsorbed gas such as water is trapped between the bar-shaped crystals.
