高真空領域における摩擦力の測定

抄録

Vacuum friction measurement system was developed in order to evaluate the sliding friction coefficient by changing load from 1.5 N to 0.98 mN, and changing pressure from 1×10⁵ Pa to 1×10^-8 Pa. The measurement was carried out on typical vacuum materials such as type 304 austenitic stainless steel which had been surface treated by chemical polishing, mechanical polishing, or electrochemical buffing. The measurement at the condition of the load less than 1 mN shows that surface adosrbate on the steels affects the friction force. However, the measurement at the condition of the pressure less 10^-5 Pa shows that surface adosrbate does not affect the friction. The friction behavior in a vacuum seems to be affected by the vacuum environment.