Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Plasma Enhanced Chemical Vapor Deposition of Interlayer Films Having a Low Dielectric Constant
Tatsuru SHIRAFUJIYasuaki HAYASHIShigehiro NISHINO
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2000 Volume 43 Issue 4 Pages 504-511

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© The Vacuum Society of Japan
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