Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
High Rate Ion Plating of High-Current Hollow Cathode Discharge
Yukio INOKUTI
Author information
JOURNAL FREE ACCESS

2001 Volume 44 Issue 4 Pages 418-427

Details
Article 1st page
Content from these authors
© The Vacuum Society of Japan
Previous article Next article
feedback
Top