Abstract
Mechanical and vacuum properties of titanium hydro-formed bellows have been experimentally investigated, such as mechanical life, spring constant, and out-gassing rate. Annealing improves the endurance of titanium bellows three to five times. The titanium bellows has modest flexibility and small hysterisis, which spring constant is 30% smaller than that of the conventional SUS316L bellows. The out-gassing rate is less than that of the SUS316L bellows in spite of baking.