Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Mechanical Properties and Outgassing Rate Measurement Of Titanium Hydro-Formed Bellows
Yoshiki TAKAHASHIKosei HIGUCHIMotosada KANEKOKenzaburo SUGISAKIYoshio SAITO
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2002 Volume 45 Issue 6 Pages 533-536

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Abstract
Mechanical and vacuum properties of titanium hydro-formed bellows have been experimentally investigated, such as mechanical life, spring constant, and out-gassing rate. Annealing improves the endurance of titanium bellows three to five times. The titanium bellows has modest flexibility and small hysterisis, which spring constant is 30% smaller than that of the conventional SUS316L bellows. The out-gassing rate is less than that of the SUS316L bellows in spite of baking.
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© The Vacuum Society of Japan
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