Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Molecular Flux Density Distribution on the Wall of a Test Dome for Measuring the Speed of a Vacuum Pump
Namio MATUDA
Author information
JOURNAL FREE ACCESS

2002 Volume 45 Issue 6 Pages 537-540

Details
Abstract
A new solution has been obtained on the distribution of the moleclular flux density striking the wall of a test dome for measuring the speed of a high vacuum pump. The calculation was carried out based on sloving Clausing's integral equations by using iterative approximation method. It is found that the exact position of the wall of the tube where flux denisty shows the same value as exhaust end of the tube (≅0.5D, where D is tube diameter) is little affected by the gas inlet position nor the angular distribtion of inlet gas.
Content from these authors
© The Vacuum Society of Japan
Previous article Next article
feedback
Top