抄録
Scratch durability of the thin films sputtered from polytetrafluoroethylene (PTFE) on copper and nickel substrates were evaluated using a pin-on-disk type apparatus. The sputter deposition rate of the PTFE thin film was faster than that of other polymers such as LDPE, HDPE, PMMA, Nylon-6, and PI. Surface of the PTFE thin film was smooth. The scratch durability of the PTFE film deposited on the copper substrate showed higher value than that on the nickel substrate. The friction and scratch durability is related to hardness of the metal substrates and adhesion strength between the PTFE film and the metal substrate. The adhesion strength between the PTFE film and evaporated metal films was higher than that between the bulk PTFE and the metal thin films. This result was estimated to be due to the difference of chemical bonding state between the PTFE thin film and the bulk PTFE.
