Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Bi2Sr2Ca1Cu2Ox Thin Film Deposition by Q-switched YAG Laser
Satoru KANEKOYoshitada SHIMIZUHiroyasu YUASAMasahiko MITSUHASHISeishiro OHYAKeisuke SAITOKenji TAKAHASHITakeshi KIMURAHiroshi FUNAKUBO
Author information
JOURNAL FREE ACCESS

2003 Volume 46 Issue 5 Pages 453-456

Details
Abstract

The fourth harmonics of Q-switched YAG was used to deposit Bi2Sr2Ca1Cu2Ox (Bi-2212) films on MgO [100] substrates. A secondary function generator was employed to modulate Q-switch while the primary generator was synchronized with flash lamps to decrease the repetition rate of laser beam. At the rate of 2 Hz, the beam energy increased 50% per pulse and the fluctuation of power stayed in ±2% during the deposition. In order to decrease the number of particles on film, targets were irradiated by the laser before deposition. Using the fourth harmonics of slower Q-switch YAG, epitaxial growth of Bi-2212 was achieved on MgO [100] substrate with the transition temperature of 72 K. Comparing the results with those deposited using an excimer laser, higher oxygen pressure was required to obtain epitaxial growth of Bi-2212.

Content from these authors
© The Vacuum Society of Japan
Previous article Next article
feedback
Top