Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Structure of Atmospheric Pressure Non-equilibrium Plasmas and Application to Advanced Materials Processing
Tomohiro NOZAKIKen OKAZAKIJoachim HEBERLEINUwe KORTSHAGEN
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2004 Volume 47 Issue 12 Pages 847-853

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© The Vacuum Society of Japan
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