Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Atomic Scale Control of Si (100) Wafer Surface and Its Characterization
Takayuki TAKAHAGI, Hiroyuki SAKAUE, Yutaka TANIGUCHI, Yosuke OKAMURA, Shoso SHIGUBARA
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2004 Volume 47 Issue 2 Pages 65-69

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