Abstract
Solid oxide fuel cell (SOFC) having a thin yttria-stabilized zirconia (YSZ) electrolyte was prepared using the RF magnetron sputtering growth. Experimental conditions were as follows : RF power was 200 W, the sputtering duration was 10 hours and the pressure of the chamber was 0.75 Pa. The dependency of the SOFC performance on the temperature of annealing treatment was investigated. The density of thin YSZ film was improved with an increase in the annealing temperature, although the density of the Ni-YSZ cermet substrate increased at the annealing temperature of 1300°C. The open circuit voltage of a single SOFC obtained 0.877 V at the operating temperature of 1000°C when the annealing temperature was 1200°C. Moreover the resistance of the cell was 2.2 Ω. Above values exceed results without annealing treatment.
