Abstract
3 GeV-RCS (Rapid Cycling Synchrotron) is constructed in Japan Atomic Energy Research Institute in Proton Accelerator Complex (J-PARC).
It will have been composed to the combination magnetic suspension type turbo molecular pump is used at rough pumping and ion pump is used at main pumping in 3 GeV-RCS vacuum pumping system.
However, the magnetic suspension type turbo molecular pump uses semiconductor chip for magnetic suspension control inside. This semiconductor chip has problem to use under the radiation and high temperature applications such as accelerator and semiconductor process.
The pump used for Gamma-ray irradiation experiment is magnetically suspended compound molecular pump TG1300M is designed without semiconductor chip inside.
