Molecular Beam Epitaxial Growth of the Zn_1-xMg_xO Films on Silicon Substrates

Abstract

Molecular beam epitaxial growth of the widegap Zn_1-xMg_xO alloys on Si (111) substrates is reported. A series of single-phase wurtzite Zn_1-xMg_xO alloys with Mg-content up to x = 0.43 are successfully obtained. It is revealed by x-ray diffraction measurement that further increase from the Mg-content promotes inclusion of rocksalt Zn_1-xMg_xO alloys. Room-temperature cathodoluminescece spectra from these Zn_1-xMg_xO alloys show a blueshift of peak energy with increasing Mg-content.