感圧部材料を改良したピラニ真空計

抄録

Pirani gauge with a tungsten filament has been widely used. The unstable sensitivity due to contamination of a tungsten filament, however, is one serious shortcoming of it.
Therefore, in order to eliminate this defect, a Pirani gauge with of coiled filament platinum clad molybdenum has been developed and put to the test, and it has been clearly proved to be stable enough for using by constant voltage circuit in oxygen and satisfactory from both the results of observation of the filament contamination with an electron microscope, and test of the strength with a simple mechanical tester.