Titanium Dioxide (TiO₂) Single Crystal Holder with a Cold Trap and a Heating Mechanism Mounted on a Conflat Flange with an Outer Diameter of 70 mm

Abstract

  We introduce a titanium dioxide (TiO₂) single crystal holder with a cold trap and a heating mechanism mounted on a conflat flange with an outer diameter of 70 mm. The basic design of the TiO₂ holder is the same with the holder for the silicon (Si) single crystal wafer [E. Kobayashi, A. Nambu, T. Kakiuchi, and K. Mase: Shinku, 50 (2007) 57]. A TiO₂ single crystal wafer is fixed on a Si wafer, and the TiO₂ is heated by the direct-current heating of the Si wafer. Using this holder we prepared clean TiO₂(110)-1×1.