Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
Review
Status Quo and Future Trends of Aberration Correction in Electron Microscopy
Kunio TAKAYANAGI
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2008 Volume 51 Issue 11 Pages 691-694

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Abstract
  Aberration correted electron microscopy (ACEM) has improved resolution to sub-angstrom regime, which allows us to study materials with light elements, with dopants and defects, and with electronic, magnetic and optical functions. Developments of ACEMs and applications that undertaken in the world are briefly reviewed, being focused particularly on 50 pm resolution STEM and TEM instrumentation.
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© 2008 The Vacuum Society of Japan
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