Letter
Calibration Service for Partial Pressure Analyzers by Two-stage Flow-dividing Method
2008 Volume 51 Issue 3 Pages 109-111
Details
2008 Volume 51 Issue 3 Pages 109-111
The calibration service for partial pressure analyzers (PPA) has been carried out from April in 2007 at NMIJ/AIST using a two-stage flow-dividing system. The pressure range is from 10-6 to 10-4 Pa and the test gases are N2, Ar, He and H2.
Results of the calibration for two types of PPA were also shown. The sensitivities of both PPAs were almost constant in the pressure range from 10-6 to 10-4 Pa, while they changed significantly with pressure higher than 10-4 Pa. The calibration uncertainties mainly caused by the instability of PPA indication were about 7% (confidence level 95%). The stability of sensitivities of both PPAs was in about 15% for 7 months.
