Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
Review
Structure and Growth Mechanism of Anodic Oxide Films Formed on Aluminum and Their Gas Emission Property in Vacuum
Sachiko ONO
Author information
JOURNAL FREE ACCESS

2009 Volume 52 Issue 12 Pages 637-644

Details
Abstract
  Fundamentals and recent research development of the structure and growth mechanism of anodic oxide films formed on pure aluminum and aluminum alloys such as A5052 and A6061 were described with focusing on their gas emission property in use of vacuum chambers. Highest volume gas emitted from anodized aluminum surface is water vapor followed by oxygen in the second. Notable suppression of gas emission from aluminum alloy surface can be attained by giving porous/barrier composite anodizing films based on the decrease in defects formation in the films.
Content from these authors
© 2009 The Vacuum Society of Japan
Previous article Next article
feedback
Top