Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
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Fabrication of Nanohole Array by Anodization of Al and Its Application to Ordered Surfaces
Hideki MASUDATakashi YANAGISHITAToshiaki KONDOKazuyuki NISHIO
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2009 Volume 52 Issue 4 Pages 207-211

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Abstract
  The fabrication of functional surfaces with fine ordered structures from submicron to nanometer scales has attracted increasing attention due to its application in various fields. In the present report, fabrication of several types of functional ordered surfaces based on the highly ordered anodic porous alumina are described. Anodic porous alumina, which is formed by anodization of Al in acidic electrolyte, is a typical self-ordered material and is promising candidate for the nanofabrication. As typical example of the fabrication of ordered surfaces, the highly ordered structures of the anodic porous alumina could be applied to the mask processes, in which the metal dot arrays or hole arrays are formed on the substrates. Some typical examples of the application of the obtained ordered surfaces were also described
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© 2009 The Vacuum Society of Japan
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