Abstract
The c-BN (cubic boron nitride) has a property of very high hardness and very low friction. Therefore, the application for cutting tool had studied during many enterprises for long time. But they hadn't gotten strong adhesive thin films to the substrates.
The c-BN thin films were prepared by magnetically enhanced plasma ion plating (MEP-IP). These thin films were inserted the intermediate layers and were prepared functionally gradient BN films. The results were gotten very strong adhesion to the substrates. The gained properties of the thin films were the hardness of about 5,400 HK (Knoop hardness) and the friction coefficient of about 0.12. That rate of the deposition was 0.7 µm/h.
