Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
Article
Preparation of Platinum Palladium Monoxide Pt1-xPdxO Thin Films
Yuki IWAINoboru MIURASetsuko MATSUMOTORyotaro NAKANOHironaga MATSUMOTO
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2010 Volume 53 Issue 2 Pages 109-113

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Abstract
  Platinum palladium monoxide (Pt1-xPdxO) thin films with an arbitrary composition, where 0≤x≤1, were prepared by reactive cosputtering of platinum and palladium targets. The oxidation states of each atom of Pt and Pd were confirmed as that of PtO and PdO, respectively. Two infrared absorption peaks were found in the mid-infrared region and they exhibited linear peak shifts toward a lower wavenumber with increasing x. Thus, we completed successful preparation of Pt1-xPdxO thin films with a homogeneous phase. The crystallinity of the Pt1-xPdxO thin films improved when the composition exceeded x=0.56. The preferred orientation changed continuously between x=0 (PtO) and x=1 (PdO). The optical bandgap decreased when x decreased from 1, and became unclear in a low Pd content region, including x=0 (PtO).
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© 2010 The Vacuum Society of Japan
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