Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
Review
Fabrication of Nano-scale Electronic Devices Based on Single-layer Graphene
Tomoki MACHIDASatoru MASUBUCHIMasashi ONOMiho ARAITakehiro YAMAGUCHI
Author information
JOURNAL FREE ACCESS

2010 Volume 53 Issue 2 Pages 94-100

Details
Abstract
  We review our recent experiments on the fabrication of nano-electronic devices in single-layer graphene. A graphene nanoribbon device was fabricated by conducting local anodic oxidation lithography using tapping-mode atomic force microcsope. The conductance of the graphene nanoribbon at the charge neutrality point was suppressed at low temperature, which suggests the opening of an energy gap due to the lateral confinement of charge carriers. A single quantum dot was fabricated by using the conventional electron beam lithography combined with plasma etching of the graphene layer. The quantum dot works as a single-electron transistor, which shows Coulomb blockade characteristics. These results suggest possibilities of the future application of the nano-electronic devices based on graphene.
Content from these authors
© 2010 The Vacuum Society of Japan
Previous article Next article
feedback
Top