Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
Letter
Structure Analyses of Organic Thin Films Prepared by a Plasma Enhanced Vacuum Evaporation
Ryousuke SUGIMOTOKousuke OSADAMasahiko KURATAHiroyuki MATSUMOTOSatoru IWAMORIKazutoshi NODA
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JOURNAL FREE ACCESS

2010 Volume 53 Issue 3 Pages 176-180

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Abstract
  Organic thin films were prepared with pyromellitic dianhydride (PMDA) and oxydianiline (ODA) by vacuum evaporation with or without argon plasma, and molecular structures and surface morphologies of the PMDA, ODA, polyamic acid (PAA) and polyimide (PI) thin films were analyzed. The surface roughness decreased due to the plasma during the deposition. Oxygen content of the PMDA thin film prepared with the plasma decreased compared to that without the plasma. However, the PMDA thin film prepared with the plasma had a hydrophilic surface compared to that without the plasma. All of these organic thin films prepared with the plasma had hydrophilic surfaces compared to those without the plasma. Surface roughness of these thin films has a smaller effect on the wettability than hydrophilic moieties.
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© 2010 The Vacuum Society of Japan
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