Evaluation of Surface Oxidation Behavior on Silver Film for Active Oxygen Detector

Abstract

  In this study, the mechanism of oxidation on silver-coated quartz crystal was investigated from the standpoint of future application to active oxygen monitoring under ultraviolet lamp processing. The effect of excited atomic oxygen (O (¹D)) on the silver surface was monitored in real time utilizing the quartz crystal microbalance (QCM) method. To clarify the surface oxidation behavior on silver thin film, scanning transmission electron microscopy (STEM) and X-ray photoelectron spectroscopy (XPS) analyses were also performed. The results showed that the oxidation layer had a Ag₂O structure and that the oxidation process progressed in three steps while the lamp was on.