Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
Review
Effect of Adsorbed Water Molecule on Vacuum Pumping Process
Yoshio SAITO
Author information
JOURNAL FREE ACCESS

2010 Volume 53 Issue 9 Pages 511-514

Details
Abstract
  Some historical background concerning studies on residual water molecules in vacuum chambers and devices are introduced. The effect of adsorbed water molecules on pumping process in initial and steady state is outlined. Pumping delay time due to sojourn time of the molecule is also discussed.
Content from these authors
© 2010 The Vacuum Society of Japan
Next article
feedback
Top