Abstract
This paper introduces three types of X-ray non-destructive inspection systems developed by the use of micro-focus X-ray technique.
The micro-CT (Computed Tomography) system reconstructs not only one slice image but also multi-images by only one scan of a inspected sample by acquiring X-ray projection data from many circumferential directions, and it creates three dimensional images from its multiple ones. It is used for the non-destructive testing of small objects such as IC devices.
The micro-Focus X-ray Fluoroscopic Inspection System has an advantage of high magnification ratio, which is often used for the inspection of the BGA (Ball Grid Array).
The Oblique-CT (Lamino-CT) system has a mechanism that rotates a sample obliquely to X-ray axis, which can make a sample put closer to the X-ray source, resulting in high magnification ratio. The combination of the micro-Focus X-ray and the Lamino-CT contributes development and inspection of PCBs (Printed Circuit Board).
