Electrical and Optical Properties of Heat-Resistant Transparent Conducting Films with ZnO-Based Multilayered Structures Fabricated by Pulsed Laser Deposition

Abstract

  It is the purpose of this report to fabricate transparent conducting multilayered films with anti-heat properties using ZnO as the chief ingredient. The multilayered films are composed of ATO (1.0 wt.% Sb₂O₃ doped tin oxide)/AZO (1.5 wt.% Al₂O₃ doped zinc oxide) structure. After the fabrication process, a test of anti-heat properties was carried out at 500°C for 24 hours. Electrical and optical properties were compared before or after the test of anti-heat properties. In this report, favorable experimental results are described.