Preparation and Evaluation of Bi Doped Nb₂O₅ Oxide Thin Films

Abstract

  Bi doped Nb₂O₅ oxide thin films were prepared by multi target radio frequency reactive sputtering in a gas mixture of argon and oxygen at 500°C. The films were amorphous according to a crystalline evaluation by X-ray diffraction. It was inferred from the result of the surface observation in the scanning electron microscope image that the mixture films created a corpuscle. X-ray photoelectron spectroscopy revealed that a chemical bond has changed by making a mixture film. These properties of prepared films strongly depended on the amount of Bi, and the films display a blue light burnt umber, burnt umber or black coloration after Li⁺ and electron insertion.