Abstract
Cantilever-based stress sensors can be used for chemical or biochemical sensors. Gas molecules adsorbed or absorbed into a polymer layer which is coated on one side of a cantilever make surface stress at the interface of the film and the cantilever. The stress can be detected as a cantilever bending and a target gas pressure in the ambient of the sensor can be deduced. For high sensitivity, high selectivity and reproducibility of the sensor, we precisely defined the structure and mechanical properties of the absorbent film.
