Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
Letter
Computer Simulation Study of a XHV Gauge for Practical Use
Toru KANAJIMakoto SAKURAI
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2012 Volume 55 Issue 9 Pages 437-439

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Abstract
  In order to measure the pressure at extremely high vacuum practically, a new design of ionization gauge is studied with the computer simulation. The new gauge has simple structure, and is operated so that electrons reciprocate many times. To avoid the undesirable effect due to the space-charge formed by the electrons, this oscillation is periodically stopped by modulating the potential of the filament. Then, the sensitivity of this gauge shall be about several-tens times higher than that of the usual B-A gauge, and the pressure at extremely high vacuum can be measured rather easily.
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© 2012 The Vacuum Society of Japan
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