Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
Essay
The Establishment of Sputtering and Plasma Process Sub-Division, its History and the Locus of Development
Tomonobu HATA
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2014 Volume 57 Issue 1 Pages 32-34

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