Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
Letter
Influence of Humidity on Hydrogen Sensing Using a Quartz Oscillator
Atsushi SUZUKIHisao HOJOTakichi KOBAYASHI
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2014 Volume 57 Issue 4 Pages 125-127

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Abstract

  The influence of atmospheric humidity on the output of a quartz friction pressure gauge (Q-gauge) was investigated because the viscosity and molecular weight of water, which is the source of humidity, are significantly smaller than those of air; therefore, they affect the Q-gauge output. In the temperature range of 10-50℃, the nominal pressure from the Q-gauge decreased by approximately several percent owing to relative humidity, which was higher than the lower explosive limit of hydrogen, and this may cause an error in hydrogen sensing. The Q-gauge output was pressure-calibrated using its humidity dependence, and therefore, the difference in the pressure-calibrated Q-gauge output (Q-gauge ratio) between 0 and 100% humidity was reduced to 1% of the Q-gauge ratio. It was indicated that the influence of humidity can be excluded by calibrating the Q-gauge output using the humidity dependence necessary for the outdoor use of that type of hydrogen sensor.

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© 2014 The Vacuum Society of Japan
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