Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
Review
Stereodynamics in O2 Adsorption on Si(100)
Mitsunori KURAHASHIYasushi YAMAUCHI
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2015 Volume 58 Issue 1 Pages 13-19

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Abstract
  A single spin-rotational state-selected [(J,M)=(2,2)] O2 beam developed recently allows us to define the alignment of an O2 molecule with respect to the defining magnetic field. A fully alignment-resolved O2 sticking experiment on a single domain Si(100) has provided the first experimental evidence that the reactivity of O2 depends on both the polar and azimuthal angles of the molecular axis relative to a surface. The analysis of the observed steric effects has clarified the followings. (1) Side-on collision is much more favorable than end-on collision for O2 dissociation on Si(100). (2) In case of side-on collision, an O2 molecule perpendicular to the dimer on Si(100) is about 40% more reactive than that parallel to the dimer. No steric effect was observed for the precursor-mediated process. O2 dissociation on the double-layer step was found to proceed nearly barrierlessly.
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© 2015 The Vacuum Society of Japan
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