Abstract
Measurements of silane concentration using a quartz friction pressure gauge (Q-gauge) in gas mixtures of hydrogen and silane were applied to the region of low pressure and low silane concentration. The measured conditions of pressures below 100 Pa and silane concentrations below 10 vol% are important because they are usually used for microcrystalline silicon film deposition in production of thin silicon solar cells. Output from the Q-gauge depended on silane concentration of 1-100 vol% in the gas mixtures at a constant pressure of 13 Pa and on silane concentrations of 1, 2, 3, 5, and 7 vol% in the gas mixtures at 13-1333 Pa. Present partial concentration measurement using the Q-gauge was shown to be applicable to gas mixtures of silane and hydrogen even at low pressures and low silane concentrations.
