Basics of Vacuum Measurement from Viewpoint of Metrology (3) An Example to Estimate Measurement Uncertainties Based on Guide to the Expression of Uncertainty in Measurement (GUM) for Calibrations of Vacuum Gauges

Abstract

  This third lecture of “Basics of Vacuum measurement from viewpoint of Metrology” gives an example to estimate measurement uncertainties based on “Guide to the expression of Uncertainty in Measurement (GUM)” for calibrations of vacuum gauges. Both a capacitance diaphragm gauge (CDG) and a pirani gauge were calibrated by direct comparison to another CDG used as a reference gauge based on JIS Z 8750. Both the procedure to summarize the calibration results and the method to estimate the expanded uncertainty are explained.