Construction of a Simple Metal Evaporator Mounted on a Conflat Flange with an Outer Diameter of 70 mm

Abstract

 We have constructed a simple metal evaporator mounted on a conflat flange with an outer diameter of 70 mm. It consists of a tungsten filament, an alumina tube, two molybdenum electrodes, tantalum foils, and electric feedthroughs. Evaporation rates are measured as a function of electric current. We used it to prepare an Au thin film and a Si (111)-√3 ×√3 R30°-Au surface.